Electrical BiasingFeatured Research

Temperature mapping on the nanoscale

Microelectronic devices can be simultaneously seen and tested with a biasing holder—taking advantage of the TEM’s analytical toolbox, like in this example, where the in-situ TEM biasing holder and EELS are used to capture changes in temperature. A team led by UCLA demonstrate a noncontact thermometric technique to measure bulk temperatures with nanometer-scale spatial resolution using plasmons.

Reference:  B.C. Regan et al. Nanoscale temperature mapping in operating microelectronic devices. Science (2015). Abstract

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