Use the full battery of TEM-based characterization techniques to record the structure and chemistry of biased electrical contacts. The wide opening area at the contact between mobile probe and sample is compatible with—and optimal for:

• High-resolution TEM imaging
• High-resolution STEM imaging
• Electron diffraction
• Energy dispersive x-ray spectroscopy (EDS)
• Electron energy loss spectroscopy (EELS)

The example shows a TEM image of a 60 nm-wide contact between the mobile biasing probe and a metal-based sample. The structure of the contact has been resolved with high spatial resolution.