Hummingbird Scientific’s in-situ MEMS Biasing/Heating SEM Sample Holder allows users to heat and/or electrically bias their sample inside the SEM. Heating can be performed to > 1000°C in closed loop control with an on-chip sensor.

The system features:

• Direct chip contact insertion mechanism promotes ease of use—no fragile probes or inconsistent contacts.
• Standard heating/biasing MEMS chips with 9 contacts.
• 4-point temperature sensing method.
• Shielded electrical cables for low current measurements.
• Integrated heating and voltage source meter controller.
• Intuitive graphical user interface for system control.
• EDS compatible over the full temperature range.