| 1590 Series – SEM | |
| Electrical Contacts | 9* |
| Contact Type | Direct chip contact |
| Max Operating Temperature | >1000°C |
| Settled Resolution at 1000°C | Up to SEM resolution |
| Temperature Stability | 100+ hours |
| Temperature Measurement | 4-point resistance sensing |
| Special cabling and sample carriers | High-voltage or High-frequency biasing |
| EDS Compatible | Yes (full temp range) |
| SEM Compatibility | Custom integration* |
SEM MEMS Heating + BiasingTechnical Specs
