SEM MEMS Heating + Biasing

High Temperature, 9-Contact Biasing and Heating, High T EDS

Technical Specs

	1590 Series – SEM
Electrical Contacts	9*
Contact Type	Direct chip contact
Max Operating Temperature	>1000°C
Settled Resolution at 1000°C	Up to SEM resolution
Temperature Stability	100+ hours
Temperature Measurement	4-point resistance sensing
EDS Compatible	Yes (full temp range)
SEM Compatibility	Custom integration*

* Contact us for Custom Configurations

Features

Overview

Hummingbird Scientific’s in-situ MEMS Biasing/Heating SEM Sample Holder allows users to heat and/or electrically bias their sample inside the SEM. Heating can be performed to > 1000°C in closed loop control with an on-chip sensor.

The system features:

Direct chip contact insertion mechanism promotes ease of use—no fragile probes or inconsistent contacts.
Standard heating/biasing MEMS chips with 9 contacts.
4-point temperature sensing method.
Shielded electrical cables for low current measurements.
Integrated heating and voltage source meter controller.
Intuitive graphical user interface for system control.
EDS compatible over the full temperature range.

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Heating

Hummingbird Scientific’s Heating + Biasing SEM holder platform is supported by our microfabrication team. All our MEMS chips are designed, fabricated, and tested in-house to assure optimal performance and quality.

Our fabricated MEMS chips-based microheaters provide:

Temperatures > 1000°C
4-point resistance sensing
> 100 hours of temperature stability
Large field of view
Compatibility with electron-based spectroscopy (EDS)

Learn more about our microfabrication facilities here.

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Biasing

Hummingbird’s Scientific Heating + Biasing sample holder has an industry leading 9 contacts (standard). All electrical contacts are available for non-heating and biasing experiments with our biasing MEMS chips. While using the heating + biasing capability with our Heating-Biasing MEMS chips, four contacts are used for heating and temperature sensing with the remaining five contacts available for biasing the sample.

Hummingbird Scientific’s graphical user interface features intuitive controls for heating and biasing functions, including temperature-set point and voltage sweeps.

All our MEMS chips are designed, fabricated, and tested in-house, and are available in our web store for our customers.

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Available For

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Cross-Correlative

Hummingbird Scientific’s in-situ Biasing + Heating sample holder is now available for SEM and X-Ray.

Our new additions will allow multimodal analysis for users to heat and/or electrically bias their sample inside the TEM, SEM or Synchrotron X-Ray.

The key advantage lies in the ability to perform comprehensive, cross-correlative analysis of a single sample. By integrating heating and electrical biasing capabilities, researchers can investigate dynamic processes under real-world conditions across different imaging systems.

This combination allows scientists to correlate structural, surface, and chemical data, leading to more robust insights into the behavior of materials and devices.

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