|Tilt Range||Up to ± 45° depending on objective pole||Up to ± 20° (alpha and beta) depending on objective pole|
|Beta-tilt accuracy||NA||<0.01 degree|
|Contact Type||Direct Chip Contact||Direct Chip Contact|
|Max Operating Temperature||> 1000°C||> 1000°C|
|Settled Resolution at 1000°C||Up to TEM resolution||Up to TEM resolution|
|Temperature Stability||+ 100 hours||+ 100 hours|
|Temperature Measurement||4-point resistance sensing||4-point resistance sensing|
|EELS / EDS Compatible||Yes||Yes|
|TEM Compatibility||TFS/FEI, JEOL, Hitachi||TFS/FEI, JEOL, Hitachi|
Hummingbird Scientific’s in-situ TEM MEMS Biasing/Heating Sample Holder allows users to heat and/or electrically bias their sample inside the TEM. Heating can be performed to > 1000°C in closed loop control with an on-chip sensor.
The system features:
- Direct chip contact insertion mechanism—no fragile probes that make inconsistent contact involved, so easy to use.
- Standard MEMS chip biasing/heating with 9 contacts
- Single and double tilt configurations
- 4-point temperature sensing method
- Shielded electrical cables for low current measurements
- Integrated heating and voltage source meter controller
- Intuitive graphical user interface for system control
The system is available as a single-tilt and double-tilt version. The double-tilt holder features a high-accuracy (<0.01 degree) beta-tilt mechanism and no tilt-backlash when changing tilt direction, making it the most stable and usable double-tilt holder available.Edit
Accurate and repeatable beta-tilt
Accurate and repeatable beta-tilt
The beta-tilting resolution and accuracy of this double-tilt Heating + Biasing TEM holder are <0.01 degree. The negligible backlash one gets when reversing tilt direction that often makes other double-tilt TEM holders difficult to use is in the same order of magnitude.
The figure on the left shows beta-tilt from 0 to 0.3 to 0 degree with an exact return to 0.0 after tilting the same amount of steps in both directions.Edit
Hummingbird Scientific’s Heating + Biasing TEM holder platform is supported by our microfabrication team. All our MEMS chips are designed, fabricated, and tested in-house to assure optimal performance and quality.
Our fabricated MEMS chips-based microheaters provide:
- Temperatures > 1000°C
- 4-point resistance sensing
- > 100 hours of temperature stability
- Large field of view
- Compatibility with electron-based spectroscopy (EELS and EDS)
Learn more about our microfabrication facilities here.
Hummingbird’s Scientific Heating + Biasing sample holder has an industry leading 9 contacts (standard). All electrical contacts are available for non-heating biasing experiments with our biasing MEMS chips. While using the heating + biasing capability with our Heating-Biasing MEMS chips, four contacts are used for heating and sensing; the remaining five contacts are available for biasing the sample.
Hummingbird Scientific’s graphical user interface features intuitive controls for heating and biasing functions, including temperature-set point and voltage sweeps. Custom camera integration options are available.
All our MEMS chips are designed, fabricated, and tested in-house, and are available in our web store for our customers.Edit
Segregation of 2D MoS2 Layers into quantum dots during in-situ high temperature heating
Few-layer 2D MoS2 samples were transferred onto the open viewing area of the MEMS heating chip (Figure (a) ) layered with residual organic layers from the transfer process. Heating up the MoS2 sample to 1000°C resulted into a 2D material with well segregated MoSx quantum dot particles embedded in carbon based-composites and areas with pure MoS2 (Figures (b)-(d) ). Particles smaller than 10 nm were observed and many display hexagonal crystal facets. The segregation happens at temperatures >1000 °C. Energy-dispersive X-ray spectroscopy (EDS) confirmed the chemical content of each segregated area. The example shows a dark-field STEM image at a temperature of 1000 °C, together with the EDS map proving the elemental segregation.
Data provided by Jay Horwath, Deep Jariwala and Eric Stach from the University of Pennsylvania.
Figure (a) BFTEM image of as-transferred 2D MoS2 flake on heater chip; (b) DFSTEM Sample heated to 1000°C showing segregation after melting events; (c) DFSTEM image showing MoSx quantum dots (light particles) embedded in carbon-rich region (dark matrix) and un transformed MoS2 (grey regions); (d) elemental EDS mapsEdit
Customization & Service
|Khim Karki, Victoriea L. Bird, Daan Hein Alsem, and Melissa K. Santala. “In Situ TEM Observation of Crystallization in Phase-Change Material,” Microscopy & Microanalysis (2018)||Abstract|
|Victoriea L. Bird, Al J. Rise, Khim Karki, Daan Hein Alsem, Geoffrey H. Campbell, and Melissa K. Santala. “Mapping Crystallization Kinetics of Phase-Change Materials Over Large Temperature Ranges Using Complementary In Situ Microscopy Techniques,” Microscopy & Microanalysis (2018)||Abstract|
|Daan Hein Alsem, James Horwath, Julio Rodriguez-Manzo, Khim Karki and Eric Stach. “Optimized High-Temperature In-Situ Transmission Electron Microscopy Double-Tilt Sample Heating Platform,” Microscopy & Microanalysis (2019)|
|Daan Hein Alsem, James Horwath, Julio Rodriguez-Manzo, Khim Karki and Eric Stach. “In-Situ Transmission Electron Microscopy Double-Tilt Sample Heating Platform.” Microscience Microscopy Congress (2019)|
|Khim Karki, Victoriea L. Bird, Julio Rodriguez-Manzo, Daan Hein Alsem, Norman Salmon, and Melissa K. Santala. “Direct Observation of Crystallization in Phase-Change Material Using In-Situ TEM,” International Microscopy Congress (2019)|
|Victoriea L. Bird, Al J. Rise, Khim Karki, Daan Hein Alsem, Geoffrey H. Campbell, and Melissa K. Santala. “Measuring Crystal Growth Rates in an Amorphous Ag-In-Sb-Te Phase-Change Material Over Large Temperature Ranges Using In-Situ Microscopy Techniques,” Materials Science and Technology (2018)|
|Xuezhe Zhou, Julio Alejandro Rodriguez Manzo, Matthew Lim, Norman Salmon, and Peter Pauzauskie. “Tracking Thermal Phase Transformations of Luminescence Materials with In-Situ TEM” Materials Research Society (2017)|