| Single-Tilt | Double-Tilt | |
| Tilt Range | Up to ± 45° depending on objective pole | Up to ± 20° (alpha and beta) depending on objective pole |
| Beta-tilt accuracy | NA | <0.01 degree |
| Electrical Contacts | 9* | 9* |
| Contact Type | Direct Chip Contact | Direct Chip Contact |
| Max Operating Temperature | > 1000°C | > 1000°C |
| Settled Resolution at 1000°C | Up to TEM resolution | Up to TEM resolution |
| Temperature Stability | + 100 hours | + 100 hours |
| Temperature Measurement | 4-point resistance sensing | 4-point resistance sensing |
| EELS / EDS Compatible | Yes (full temp range) | Yes (full temp range) |
| TEM Compatibility | TFS/FEI, JEOL, Hitachi | TFS/FEI, JEOL, Hitachi |
Heating BiasingTechnical Specs
